VM Inc, formerly Adaptive Plasma Technology Corp, is a Korea-based company principally engaged in the manufacture and sale of etching equipment that are used for the semiconductor manufacturing. The Companyâs product profile consists of dry etchers, light emitting diode (LED) etchers, through silicon via (TSV) etchers, plasma doping system, plasma sawing system and others. The dry etchers are inclusive of oxide etchers, polysilicon (Poly) etchers and metal etchers. The main product is 300mm poly etch system, which is comprised of load port, equipment front end module (EFEM), buffer module (BM), transfer module (TM) and process module (PM).
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