Nanometrics Incorporated has announced the launch of Imperia, its new photoluminescence, or PL, system, for advanced compound semiconductor manufacturing. The Imperia is a fully automated non-contact optical system offering comprehensive metrology and inspection for high brightness light emitting diode (HB-LED) manufacturing applications. The system enables rapid simultaneous PL measurement and defect inspection.

With its advanced software capabilities, the Imperia provides critical defect analysis, classification and yield prediction for critical steps in substrate, epitaxial junction formation, and interconnect processes.