Amtech : Entrepix Acquisition Overview

ENTREPIX ACQUISITION OVERVIEW

J A N U A R Y 2 0 2 3

Safe Harbor Statement

This Presentation may contain certain statements or information that constitute "forward-looking statements" (as such term is defined in Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, and the Private Securities Litigation

Reform Act of 1995). In some, but not all, cases, forward-looking statements can be identified by terminology such as "may," "plan," "anticipate," "seek," "will," "expect," "intend," "estimate," "anticipate," "believe," "continue," "predict," "potential," "project," "should," "would," "could", "likely," "future," "target," "forecast," "goal," "observe," and "strategy" or the negative of these terms or other comparable terminology. Examples of forward-looking statements include statements regarding Amtech System, Inc.'s ("Amtech" or the "Company") future financial results, operating results, business strategies, projected costs, products under development, competitive positions, plans and objectives of Amtech and its management for future operations, efforts to improve operational efficiencies and effectiveness and profitably grow our revenue, and enhancements to our technologies and expansion

of our product portfolio. Such forward-looking statements and information are provided by the Company based on current expectations of the Company and reflect various assumptions of management concerning the future performance of the Company, and are subject to significant business, economic and competitive risks, uncertainties and contingencies, many of which are beyond the control of the Company. Accordingly, there can be no guarantee that such forward-looking statements or information will be realized. Actual results may differ materially from historical results and expectations based on forward-looking statements made in this document or elsewhere by Amtech or on its behalf. No representations or warranties are made as to the accuracy or reasonableness of any expectations or assumptions or the forward-looking statements or information based thereon. Only those representations and warranties that are made in a definitive written agreement related to a transaction, when and if executed, and subject to any limitations and restrictions as may be specified in such definitive agreement, shall have any effect, legal or otherwise. Each recipient of forward-looking statements should make an independent assessment of the merits of and should consult its own professional advisors. Except as required by law, we undertake no obligation to publicly update forward-looking statements, whether as a result of new information, future events, or otherwise.

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JANUARY 17, 2023

"Amtech Systems Acquires Entrepix, a Globally Recognized Expert in CMP and Wafer Cleaning"

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ENTREPIX ACQUISITION

200mm CMP and

Wafer Clean

Leader

Solid Performance

Track record of solid EBITDA performance. Less cyclical revenue streams.

Compound Semi Customer Base

Strong participation in Compound Semi applications. Multiple product offerings.

Entrenched in CMP

Process experts in CMP. Trusted process partner for leading fabs.

~20%	of revenue is	WAFER CLEANING EQUIPMENT	CMP EQUIPMENT UPGRADES	CMP PARTS &SERVICE
derived from
Compound Semi	Supporting EV growth across the entire portfolio
	customer

applications, estimated

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ENTREPIX ACQUISITION

Entrepix Revenue Streams

•	OnTrak DSS-200 Cleaner	Business Mix - Approximate
	o High growth across Si and	*based on analysis of LTM and backlog
	Compound Semi customer base
•	Engineered Products

1. Upgrades

• 1. Replacement parts
• Services
• 1. CMP Foundry Services
  1. CMP Field Service

Capital Equipment

Services

Engineered Products

AMTECH GROUP

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