Rohm and Haas Electronic Materials, CMP Technologies, a leader and innovator in chemical mechanical planarization (CMP) technology for the global semiconductor industry, today introduced two additions to its VisionPad? platform of CMP polishing pads, both offering world-class defectivity performance, exceptional planarization levels and extended product lifetime.

Product highlights:

  • VisionPad 3200 is designed to improve the defectivity levels and planarization capability of the industry standard Politex?, while extending copper barrier polishing lifetime. These improvements increase customer throughput, improve customer yields and reduce tool downtime.
  • VisionPad 3500 offers the defectivity levels of Politex combined with the planarization capability of the industry standard IC1000? in copper barrier polishing. VisionPad 3500 is also well suited for tungsten polishing and copper clearing.

Designed for semiconductor manufacturers running advanced metals processes, the VisionPad 3200 and VisionPad 3500 take advantage of unique chemistries that improve die yields by minimizing scratches, chatter marks and other defects across the wafer. The company's proprietary polyurethane formulations used to manufacture these new pads result in a softer surface than a traditional hard pad, needed to reduce defects, while maintaining the rigidity needed for excellent planarization performance.

The product lifetime of both the VisionPad 3200 and VisionPad 3500 is similar to a traditional hard pad and surpasses that of a traditional soft pad. This enables customers to balance all platens and reduce the downtime associated with pad changes and qualifications. These products improve process throughput and die yields in advanced technology nodes and can also be integrated into existing production processes.

?These new products represent a key and timely evolution of our pad offerings,? said Cathie Markham, vice president of technology, Rohm and Haas Electronic Materials, CMP Technologies. ?Our customers are migrating to more advanced processes and nodes. In response, we are developing and introducing products designed specifically to meet their changing polishing requirements.?

Unlike traditional soft pads, the VisionPad 3200 and VisionPad 3500 are conditioned. This allows for pad surface regeneration to achieve optimal polishing results that are constant throughout the pad's life as well as from pad to pad. Both pads are available in multiple grooving, subpad and adhesive configurations.

All VisionPad products are manufactured using SPC/SQC to ensure the highest quality and consistency. The company is offering both new products for customer testing today.

Visit Rohm and Haas Electronic Materials at Semicon West, booth #1216 in the South Hall.

About Rohm and Haas Electronic Materials

Rohm and Haas Electronic Materials develops and delivers innovative material solutions and processes to the electronic and optoelectronic industries. Focused on the circuit board, semiconductor manufacturing, flat panel display and advanced packaging industries, its products and technologies are integral elements in electronic devices around the world.

The CMP Technologies business (formerly Rodel) has been a leader and innovator in polishing technology for the global semiconductor industry since 1969. CMP Technologies' products include polishing pads, conditioners and slurries. CMP Technologies maintains operations throughout the world, including manufacturing facilities in Newark, Delaware, Hsinchu, Taiwan and in the Mie and Kyoto prefectures in Japan. Additional information is available at http://rohmhaas.com.

About Rohm and Haas Company

Leading the way since 1909, Rohm and Haas (NYSE:ROH) is a global pioneer in the creation and development of innovative technologies and solutions for the specialty materials industry. The company's technologies are found in a wide range of markets including: Building and Construction, Electronics, Food and Retail, Household and Personal Care, Industrial Process, Packaging, Paper, Transportation and Water. Our innovative technologies and solutions help to improve life everyday, around the world. Based in Philadelphia, PA, the company generated annual sales of approximately $8.2 billion in 2006. Visit www.rohmhaas.com for more information. Imagine the possibilities?.

Safe Harbor Statement

This release includes forward-looking statements. Actual results could vary materially, due to changes in current expectations. The forward-looking statements contained in this announcement concern new products, product performance, corporate plans and development and involve risks and uncertainties and are subject to change.

Rohm and Haas Electronic Materials
CMP Technologies
Karen M. Winkelman, 602-470-4418
kmwinkelman@rohmhaas.com
or
Loomis Group
Jennifer Anselmo, 415-882-9494
anselmoj@loomisgroup.com