The MMX is a new system for measuring the position of the written pattern, thereby ensuring the quality of the produced photomask. The product is based on the SLX mask writer platform and Mycronic’s existing Prexision-MMS metrology system for display photomasks. In addition, the MMX is equipped with state-of-the-art optics and software, including a modern user interface and analysis tools. The MMX targets mature semiconductor nodes, enabling optimal flexibility for replacement of old legacy systems and future volume growth.
“We are happy to receive the first order for our new semiconductor metrology system. The synergies across our product lines ensure a platform that meets our customers’ highest requirements on reliability and productivity” says
Mycronic’s Pattern Generators division provides mask writers and metrology systems for display manufacturing and production of semiconductors.
For additional information, please contact:
Sr VP Pattern Generators
Tel: +46 70 984 42 82
E-mail: charlott.samuelsson@mycronic.com
Director Investor Relations
Tel: +46 70 558 39 19
E-mail: sven.chetkovich@mycronic.com
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