Russell Low

Chief Executive Officer at AXCELIS TECHNOLOGIES, INC.

Net worth: 23 M $ as of 2026-05-30

55 year

62 connections

Producer Manufacturing

Electronic Technology

Consumer Services

Profile

Dr. Russell J.
Low is a President, Chief Executive Officer & Director at Axcelis Technologies, Inc. and a Member at Massachusetts High Technology Council, Inc. He is on the Board of Directors at Axcelis Technologies, Inc. Dr. Low was previously employed as a VP-Engineering-MOCVD Business Unit by Veeco Instruments, Inc., a Technology Director by Varian Semiconductor Equipment Associates, Inc., and a Principal by Applied Materials, Inc. He received his undergraduate degree from The University of Southampton, an MBA from Massachusetts Institute of Technology and a doctorate degree from the University of Oxford.

Known holdings in public companies

Company	Date	Number of shares	Valuation	Valuation date
AXCELIS TECHNOLOGIES, INC. 0.5%	2026-05-17	154,900 ( 0.5% )	23 M $	2026-05-30

Russell Low active positions

Companies	Position	Start
AXCELIS TECHNOLOGIES, INC.	Chief Executive Officer	2023-05-10
Massachusetts High Technology Council, Inc. Massachusetts High Technology Council, Inc. Internet Software/ServicesTechnology Services Engages in collective and collaborative technologies	Corporate Officer/Principal	-

All active positions of Russell Low

Former positions of Russell Low

Companies	Position	End
VEECO INSTRUMENTS INC.	Corporate Officer/Principal	2016-09-30
Varian Semiconductor Equipment Associates, Inc. Varian Semiconductor Equipment Associates, Inc. SemiconductorsElectronic Technology Designs, manufactures and services semiconductor processing equipment	Chief Tech/Sci/R&D Officer	2011-12-31
APPLIED MATERIALS, INC.	Corporate Officer/Principal	2002-12-31

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Training of Russell Low

Experiences
Positions held

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Inactive

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Private companies

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Connections

1st degree connections

1st degree companies

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Female

Members of the board

Executives

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Linked companies

Private companies	8
Applied Materials, Inc. Applied Materials, Inc. Industrial MachineryProducer Manufacturing Designs, develops, manufactures and sells equipment to fabricate semiconductor chips, spare parts, factory automation software & liquid crystal displays	Producer Manufacturing
Veeco Instruments, Inc. Veeco Instruments, Inc. Electronic Production EquipmentElectronic Technology Designs, manufactures and markets equipment for light emitting diodes & hard disk drives	Electronic Technology
Varian Semiconductor Equipment Associates, Inc. Varian Semiconductor Equipment Associates, Inc. SemiconductorsElectronic Technology Designs, manufactures and services semiconductor processing equipment	Electronic Technology
Axcelis Technologies, Inc. Axcelis Technologies, Inc. Industrial MachineryProducer Manufacturing Manufactures semiconductor equipment	Producer Manufacturing
University of Oxford University of Oxford Other Consumer ServicesConsumer Services Functions as a College/University	Consumer Services
The University of Southampton The University of Southampton Other Consumer ServicesConsumer Services Functions as a College/University	Consumer Services
Massachusetts Institute of Technology Massachusetts Institute of Technology Finance/Rental/LeasingFinance Functions as a College/University	Finance
Massachusetts High Technology Council, Inc. Massachusetts High Technology Council, Inc. Internet Software/ServicesTechnology Services Engages in collective and collaborative technologies	Technology Services