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Leo Berlinghieri
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Profile
Leo Berlinghieri served as President, Chief Executive Officer & Director at MKS, Inc. from 2005 to 2013.
Mr. Berlinghieri was Chairman at Semiconductor Equipment & Materials International from 2012 to 2013.
Mr. Berlinghieri was an Independent Director at Rudolph Technologies, Inc. from 2008 to 2019.
Mr. Berlinghieri was Director at Massachusetts High Technology Council, Inc. from 2006 to 2013.
Mr. Berlinghieri was an Independent Director at Onto Innovation, Inc. from 2008 to 2025.
Former jobs include roles at MKS, Inc., Semiconductor Equipment & Materials International, Rudolph Technologies, Inc., Massachusetts High Technology Council, Inc., and Onto Innovation, Inc.
Former positions of Leo Berlinghieri
| Companies | Position | End |
|---|---|---|
| ONTO INNOVATION INC. | Director/Board Member | 2025-04-30 |
Rudolph Technologies, Inc.
 Rudolph Technologies, Inc. Packaged SoftwareTechnology Services Develops process control analytical software used by semiconductor and advanced packaging device manufacturers | Director/Board Member | 2019-10-24 |
| MKS INC. | Chief Executive Officer | 2013-12-29 |
Massachusetts High Technology Council, Inc.
 Massachusetts High Technology Council, Inc. Internet Software/ServicesTechnology Services Engages in collective and collaborative technologies | Director/Board Member | 2012-12-31 |
Semiconductor Equipment & Materials International
 Semiconductor Equipment & Materials International SemiconductorsElectronic Technology Manufactures and supplies semiconductor equipments | Chairman | 2012-12-31 |
Experiences
Positions held
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Inactive
Listed companies
Private companies
Connections
60
1st degree connections
5
1st degree companies
Male
Female
Members of the board
Executives
Linked companies
| Private companies | 5 |
|---|---|
MKS, Inc.
 MKS, Inc. Industrial MachineryProducer Manufacturing Manufactures instruments, components and subsystems to measure, monitor, deliver, analyze, power and control critical parameters | Producer Manufacturing |
Rudolph Technologies, Inc.
Rudolph Technologies, Inc. Packaged SoftwareTechnology Services Develops process control analytical software used by semiconductor and advanced packaging device manufacturers | Technology Services |
Semiconductor Equipment & Materials International
Semiconductor Equipment & Materials International SemiconductorsElectronic Technology Manufactures and supplies semiconductor equipments | Electronic Technology |
Massachusetts High Technology Council, Inc.
Massachusetts High Technology Council, Inc. Internet Software/ServicesTechnology Services Engages in collective and collaborative technologies | Technology Services |
Onto Innovation, Inc.
 Onto Innovation, Inc. Electronic Equipment/InstrumentsElectronic Technology Develops process control systems | Electronic Technology |
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