Group Onto Innovation Inc.

Part of Onto Innovation, Inc., Onto Innovation Japan Co. Ltd. is a provider of advanced semiconductor manufacturing solutions, specializing in high-speed inspection, optical critical dimension and film metrology, lithography steppers for advanced packaging, and process control and analytics software. The company is located in Japan. The Japanese company ’ s product portfolio supports wafer and panel manufacturing, CMOS technologies, specialty semiconductors, advanced packaging, and industrial applications. Its technologies enable defect detection, 3D metrology, adaptive lithography, and AI-driven analytics for yield, throughput, device performance, and reliability across semiconductor structures such as 2nm logic, 3D NAND, DRAM, compound semiconductors, and MEMS. Onto Innovation Japan Co. also offers support programs, technical training, and a packaging applications center focused on panel-level packaging, chiplet architectures, and AI-enabled packages. The company has expanded its capabilities by acquiring materials composition and electrical analysis product lines for wafer contamination monitoring, materials characterization, and surface charge metrology.