Entegris, Inc. announced it has entered into a long-term supply agreement with onsemi. Under the terms of the agreement, Entegris will provide onsemi a broad range of co-optimized chemical mechanical planarization (CMP) solutions for silicon carbide (SiC) applications. While SiC offers critical advantages for the manufacture of advanced semiconductors, it is a very hard material that is naturally dense and chemically inert, making it difficult to achieve the desired surface quality on the wafer.

With its complementary suite of CMP solutions including slurries, pads, brushes, and post-CMP cleans, Entegris isa leader for CMP solutions that enable the high-volume manufacture of SiC wafers.